About the Publisher Forgotten Books publishes hundreds of thousands of rare and classic books. Find more at www.forgottenbooks.com This book is a reproduction of an important historical work.

Details on use, stability, and NIST analytical methods are also included. Why buy a book you can download for free? We print this book so you don't have to.

The Microelectromechanical System (MEMS)5 5-in-1 is a standard reference device sold as a NIST Standard Reference Material (SRM) in the form of a test chip that contains test structures for five standard test methods.

A National Institute of Standards and Technology (NIST) Standard Reference Material (SRM) meets specific certification criteria and is issued with a certificate of analysis that reports the results of its characterization and provides ...